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OFERTA FORMATIVA DCM - FCT/UNL
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Clean Room (Production) Lab
Resistive and e-beam evaporators
Location:
Clean room CEMOP – thin-film deposition lab
Responsible:
Luís Pereira
AJA ATC-1300 F Sputtering
AJA ATC-1800 F Sputtering
AJA Orion-8 Sputtering
AnnealSys As-One 100 Rapid thermal processing
ELETTRORAVA PECVD
HOSITRAD PECVD
Resistive and e-beam evaporators
Speciality Coating PDS-2010 Parylene coater
“3 chamber” PECVD
“3 target” home-made sputtering
“Home-made” e-beam evaporator
“Pfeiffer” sputtering
