SEM - Hitachi TM 3030Plus Tabletop

Location: CEMOP
Responsible: Daniela Gomes
 
Description:
The TM3030Plus has a premium SE detector which has been incorporated in FE-SEM & VP-SEM and well-accepted by users as a high-sensitivity detector. It operates effectively under the low-vacuum environment and allows for quick SE image observation without specimen preparation.

Magnification

5x ~ 30,000x or up to 120,000x withigital zoom

Accelerating Voltage

5kV, 15kV

OBSERVATION MODE

BSE:Conductor/Standard/Charge-up Reduction
SE:Standard/Charge-up Reduction
Mix:Standard/Charge-up Reduction

SIGNAL SELECTION

BSE/SE/Mix

Sample Size:

Up to 70mm in diameter and 50mm thickness

Stage Movement

X = 35mm; Y = 35mm

ELECTRON GUN

Pre-centered cartridge filament

AUTOMATIC FUNCTIONS

Auto start, Auto focus, Auto brightness/contrast