Specifications:
- Electron gun: W filament
- Accelerating voltage: 1 –30 kV
- "Out-lens" detectors
- Operating modes: image observation with secondary or backscattered electrons; digital display of absorbed electrons; elemental chemical analysis (point, linear and area) by characteristic X-ray emission and mapping of chemical composition.
- Magnification range 30 – 50000 (max. resolution 10 nm)
- Recommended emission current range: 60-80µA
- EDS detector: Oxford INCAx-act LN2-free Analytical 10 mm2, resolution of 125 eV
- Elements detection limit: higher than B